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薄膜热电阻热流传感器的对比标定结果及分析

杨凯 刘济春 陈苏宇 朱新新 王辉

杨凯, 刘济春, 陈苏宇, 等. 薄膜热电阻热流传感器的对比标定结果及分析[J]. 实验流体力学, 2023, 37(6): 106-111 doi: 10.11729/syltlx20210129
引用本文: 杨凯, 刘济春, 陈苏宇, 等. 薄膜热电阻热流传感器的对比标定结果及分析[J]. 实验流体力学, 2023, 37(6): 106-111 doi: 10.11729/syltlx20210129
YANG K, LIU J C, CHEN S Y, et al. Calibration results and analysis of thin-film gauges calibrated with the transfer method[J]. Journal of Experiments in Fluid Mechanics, 2023, 37(6): 106-111 doi: 10.11729/syltlx20210129
Citation: YANG K, LIU J C, CHEN S Y, et al. Calibration results and analysis of thin-film gauges calibrated with the transfer method[J]. Journal of Experiments in Fluid Mechanics, 2023, 37(6): 106-111 doi: 10.11729/syltlx20210129

薄膜热电阻热流传感器的对比标定结果及分析

doi: 10.11729/syltlx20210129
基金项目: 国家重点研发计划项目(2019YFA0405300);国家自然科学基金项目(11902330)
详细信息
    作者简介:

    杨凯:(1986—),男,江西新干人,副研究员。研究方向:热流测试,模态参数辨识,多目标优化。通信地址:四川省绵阳市涪城区二环路南段6号(621000)。E-mail:yg.hit@hotmail.com

    通讯作者:

    E-mail:yg.hit@hotmail.com

  • 中图分类号: V441

Calibration results and analysis of thin-film gauges calibrated with the transfer method

  • 摘要: 常用于薄膜热电阻热流传感器(简称薄膜热流计)的两步法存在标定步骤多、误差源多等问题。在解决吸收薄膜必要性、标定时限和标定热流范围等问题的基础上,实现了薄膜热流计的对比标定。在对比标定薄膜热流计时,基体材料的热物性参数乘积及热电阻的电阻–温度系数被处理为简单的传感器灵敏度系数,使得标定实验仅需重复简单的步骤,有效减少了误差源;针对通过对比标定获得的多支薄膜热流计灵敏度系数差异大的问题,在分析其测温原理的基础上,通过去除热电阻的电阻–温度系数,得到同一批次生产的多支薄膜热流计较为一致的修正灵敏度系数。薄膜热流计对比标定结果的扩展不确定度不超过6.5%,明显优于两步法标定结果的扩展不确定度(约10.7%),提升了薄膜热流计测热结果的可信度。
  • 图  1  对比标定设备结构图

    Figure  1.  The facility for statically calibrating heat-flux sensors

    图  2  待标定的薄膜热流传感器

    Figure  2.  The thin-film gauge

    图  3  薄膜热流计的对比标定原始数据与计算结果

    Figure  3.  The typical profiles of a thin-film gauge's calibration data and calculation result

    图  4  薄膜热流计对计算热流结果的修正

    Figure  4.  The corrected results of the calculated heat flux measured with a thin-film gauge

    图  5  薄膜热电阻的标定结果

    Figure  5.  The calibration results of a thin-film gauge

    表  1  其他7支薄膜热流计的标定结果

    Table  1.   The calibration results of other 7 thin-film gauges

    编号Sensitivity
    /(Ω·s−0.5·kW−1·m2)
    Maximum
    non-linearity/%
    Resistance-temperature
    factor /(Ω·℃−1
    Correction sensitivity
    /(℃·s−0.5·W−1·m2)
    1 0.03451 0.414 0.1207 0.2859
    2 0.02183 0.295 0.0787 0.2773
    3 0.02133 0.069 0.0767 0.2782
    4 0.02352 0.172 0.0824 0.2856
    5 0.03519 0.373 0.1224 0.2874
    6 0.02817 0.525 0.0982 0.2868
    7 0.02627 0.246 0.0921 0.2852
    下载: 导出CSV

    表  2  薄膜热流计对比标定结果的不确定度估计

    Table  2.   Estimation of uncertainties for the calibration results of a thin-film gauge

    Uncertainty sourceTypeUncertainty
    Transfer standard ECR B 0.6%
    Gardon gauge A 0.606%
    Non-uniformity and time stability of the laser beam A 2.8%
    Position alignment B 0.1%
    Data acquisition unit B 0.5%
    High-temperature paint B 1.0%
    Current source B 0.5%
    Non-linearity A 0.536%
    Relative expanded uncertainty(k = 2) The thin-film gauge 6.44%
    Relative expanded uncertainty(k = 2) [13-14] 10.72%
    注: ①定期利用ECR对水冷Gardon计进行校准,保证了水冷Gardon计可溯源至工业级最高的功率计标准,通过校准数据的线性拟合,得到源于水  冷Gardon计自身的不确定度0.606%。
      ②由于不同的感应面尺寸和传感器在标定系统中移动时的定位精度等问题,标定光斑的均匀性直接影响标定结果的准确性,因此利用面阵CCD相机  对标定光斑进行拍照,进而分析得到标定光斑功率分布均匀性和时间稳定性的不确定度为2.8%。
      ③来自于图4
      ④k = 2表示不确定度因素符合正态分布,置信概率为95%。
    下载: 导出CSV
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出版历程
  • 收稿日期:  2021-09-27
  • 修回日期:  2021-10-25
  • 录用日期:  2021-12-03
  • 网络出版日期:  2022-11-15
  • 刊出日期:  2023-12-30

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