原子层热电堆热流传感器的发展及其应用

Development and applications of atomic layer thermopile heat-flux sensors

  • 摘要: 高频脉动热流在高超声速边界层转捩、激波/边界层干扰等气动基础问题的实验研究中非常重要。当前,高频脉动热流测试主要依赖于原子层热电堆(Atomic Layer Thermopile, ALTP)热流传感器。采用金属有机化学气相沉积技术路线,在优化沉积环境条件参数的基础上发展了性能更优的ALTP热流传感器。面向传感器小型化、耐高温、柔性等发展需求,通过导电膜连接将多条YBa2Cu3O7-δ(YBCO)薄膜首尾串联,在保持传感器尺寸不变的同时提高灵敏度系数,为传感器小型化奠定了基础;通过替换常规ALTP热流传感器敏感元的热电材料体系,研制了基于La1-xCaxMnO3(LCMO)的耐高温(超过500℃)ALTP热流传感器样件。针对LCMO的能量输运特点,采用半导体材料性能调控方法,以交替串联的方式延长敏感薄膜的有效长度,进而能在有限的传感器感应面上布置更多的敏感薄膜;以表面经特殊处理的金属薄带为基底替换斜切SrTiO3晶片,发展了柔性ALTP热流传感器,便于开展高频脉动热流的密集点测试以及在复杂曲面等位置布放高频脉动热流测点。传感器应用方面,除在激波风洞等实验环境下开展高频脉动热流测试的应用外,针对薄膜热电阻和同轴热电偶标定环节多、测热结果不确定度偏高等问题,讨论了利用ALTP热流传感器在线标定的可行性;针对高超声速低密度风洞中的薄壁量热计、同轴热电偶和红外热图等测热方式易受噪声干扰、不确定度高以及有效时间短等问题,通过风洞实验验证了ALTP热流传感器在高超声速低密度风洞中长时间中低热流测试的可行性,弥补了现有测热手段的不足。

     

    Abstract: High-frequency fluctuation heat-flux is one of the key quantities in experimental investigations on basic aerodynamic problems related to hypervelocity boundary layer transition and shock wave/boundary layer interaction. Currently, the measurement of high-frequency fluctuation heat flux can be achieved with Atomic Layer Thermopile (ALTP) heat-flux sensors. Different from the pulse laser deposition technique, ALTP sensors with a higher sensitivity and faster response time are developed by the metal-organic chemical vapor deposition technique with optimized technology parameters. To achieve a higher sensitivity, multiple YBCO (YBa2Cu3O7-δ) films, the sensitive element of the ALTP heat-flux sensor, are connected in series by conductive films. Discussion on the tradeoff between high sensitivity and fast dynamic response is helpful for developing small-sized ALTP sensors with optimized performance in the near future. In view of the limited temperature tolerance of the YBCO film, a new generation of ALTP sensors based on LCMO (La1-xCaxMnO3) is developed and calibrated after a test in a high temperature environment. Similarly, multiple LCMO lines are alternately connected in series by conductive lines, because LCMO can function as a semiconductor to alter its electrode polar. Then more LCMO lines can be placed on the sensitive surface of the same size. Flexible sensors are required, when the models have a curved surfaces. But inclined SrTiO3 slice, that is the substrate of general ALTP sensors, cannot be buckled. Hence, flexible ALTP sensors are developed, in which a flexible Hastelloy C-276 film with an MgO interlayer is used as the substrate. The static calibration result of about 2.81 μV/(kW·m−2) shows the potential. Because ALTP sensors have good characteristics of fast response time, they are frequently used in shock tunnels and quiet hypersonic wind tunnels to help experimentally investigate the basic aerodynamic problems. Moreover, ALTP heat-flux sensors have high linearity, while its output is directly proportional to the input heat flux. Hence, ALTP heat-flux sensors can be used to measure the average heat flux. Its application in hypervelocity low-density wind tunnels confirms that ALTP sensors are valuable, especially since considering the frequently-used thin-skin calorimeters, coaxial thermocouples and infrared thermographic method have the problems of being sensitive to the noise, short effective time, and high uncertainty. Furthermore, ALTP heat-flux sensors can be used for on-line calibration of thin-film resistance gauges and coaxial thermopiles in shock tunnel tests, as since the frequently-used two-stage calibration method has a higher uncertainty.

     

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